SCIENCE - Designing new sources of extreme ultraviolet light for making integrated circuits with next generation lithography

When you heat a tiny droplet of liquid tin with a laser, plasma forms on the surface of the droplet and produces extreme ultraviolet (EUV) light, which has a higher frequency and greater energy than normal ultraviolet ...

http://phys.org/news/2013-10-sources-extreme-ultraviolet-circuits-lith